Performance Analysis for Meso-Scale Scroll Pumps

Presented at
The 3rd Harsh-Environment Mass Spectrometry Workshop and
The 2nd NASA/JPL Miniature Vacuum Pumps Workshop
March 25-28, 2002 Pasadena, CA

Author: Eric Moore, E. Phillip Muntz (University of Southern California); Francis Eyre, Nosang Myung, Otto Orient, Kirill Shcheglov, Dean Wiberg



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