Microfabrication of Cylindrical Ion Trap Mass Spectrometer Arrays

Presented at
The 3rd Harsh-Environment Mass Spectrometry Workshop and
The 2nd NASA/JPL Miniature Vacuum Pumps Workshop
March 25-28, 2002 Pasadena, CA

Author: Tim Short, David Fries, Gottfried Kibelka (Center for Ocean Technology, University of South Florida); Himani Peddanenikalva, Shekhar Bhansali (Dept. of Electrical Engineering, University of South Florida)



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