Progress Toward Highly Miniaturized Vacuum Pumps

Presented at the
2nd Workshop on Harsh-Environment Mass Spectrometry
March 18-21, 2001, St. Petersburg, Florida, Center for Ocean Technology

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 Author: Dean Wiberg
Jet Propulsion Laboratory
Table of Contents
  1. Progress Toward Highly Miniaturized Vacuum Pumps
  2. Project Objectives and Approach:
  3. GC/MS System Block Diagram
  4. JPL Fabricated Miniaturized Quadrupole Mass Filters
  5. LIGA Fabricated Scroll Pump for Vacuum Roughing
  6. LIGA Fabricated Scroll Pump for Vacuum Roughing II
  7. Creare Vacuum Pump Technology
  8. Peristaltic Pump Concept
  9. Miniature TMP Comparison
  10. Miniature TMP: Measured Specs
  11. Subminiature TMP
  12. Meso Vacuum Pump
  13. Meso Vacuum Pump II
  14. Preliminary Design of PADT’s Turbo Molecular Pump
  15. Analysis of Turbo Molecular Pump
  16. First Test Rig
  17. Conclusions
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